高纯净型压力表YTJ
High Purity Pressure Gauge
型号标示
Model: YTJA YTJB YTJE
产品概述:
YTJ 高纯净型压力表主要应用于半导体领域。产品根据洁净度等级,可分为 (YTJA) A 级 (YTJB) / BA 级(YTJE) / EP 级3 种类型
◆ 根据使用特性可选择SUS316Ti、SUS316、SUS316L 等不同材料的测压元件。
◆ 支持G1/4、NPT1/4、9/16-18UNF、1/4VCR(M)、1/4VCR(F)等多种连接形式。
◆ 所有零部件都经过超声波纯水处理。
◆ 选用无氧真空室的高纯***气保护焊接作业。
◆ 产品经过严格的耐压及气密性检测。气密性可达到1 × 10-10 Pa·m3/s。
◆ 测量范围:-0.1~0 至0-35MPa。
◆ 示值精度:1.5%;2.5%。
Brief introduction
The gauge is mainly used in semiconductor. It could be sorted to three kinds as class A, class BA and class EP by their purity degrees.
◆ It could choose the pressure elements of SUS316Ti, SUS316, SUS316L by your demand.
◆ It supports connection types as G1/4,NPT1/4, 9/16-18UNF, 1/4VCR(M), 1/4VCR(F) and so on.
◆ All the parts would be dealt with by ultrasonic pure-water.
◆ Protect welding work with the high purity argon.
◆ With strict detection of compression resistance and airproof which could achieve 1 × 10-9 Pa·m3/s.
◆ Measure ranges: 0.1~0MPa to 0-35MPa.
◆ Accuracy: 1.5%; 2.5%.
高纯净表洁净度等级
The Clean Grade of the High-Purity Pressure Gauge
A 级
清 洗:药液超声波清洗,纯水超声波清洗
组装调试:洁净室(洁净度10000)
包 装:N2 气体吹扫,密封包装
A Grade:
Washing: Clean with medicine liquid ultrasonic, pure water ultrasonic washing
Installation and debugging: Clean room (Clean Grade 10000)
Package: N2 gas clear away, seal package
BA 级
零 件:(气体接触部位)机械抛光处理
清 洗:药液超声波清洗,纯水超声波清洗
洁 净 度:等级VI(A***E B40,1 Level)
组装调试:洁净室(洁净度10000 ISO Class4)
工作台(洁净度100 ISO Class2)
包 装:N2 气体吹扫,PET 袋真空密封包装
BA Grade:
Part: (Gas contact part) machine polishing
Washing: Clean with medicine liquid ultrasonic
Clean Grade: VI (A***E B40,1 Level)
Installation and debugging: Clean room (Clean Grade 10000 ISO Class4)
Working desk (Clean Grade 100 ISO Class2)
Package: N2 gas clear away, seal package with vacuum PET bag
EP 级
零 件:(气体接触部位)电解抛光
清 洗:药液超声波清洗,纯水超声波清洗
洁 净 度:(ISO Class 1) 在0.1 μm以上的肉眼
不可见微粒子数量10 个以内。
组装调试:洁净室(洁净度1000 ISO Class3) 工作台(洁净度100 ISO Class2)
包 装:N2 气体吹扫,PET 袋真空密封包装
EP Grade:
Part: (Gas contact part) electrolyte polishing
Washing: Clean with medicine liquid ultrasonic
Clean Grade: (ISO Class 1) less than 10 corpuscule which is bigger than 0.1μm
can not seen with people eyes.
Installation and debugging: Clean room (Clean Grade 1000 ISO Class3)
Working desk (Clean Grade 100 ISO Class2)
Package: N2 gas clear away, seal package with vacuum PET bag
几种规格产品 Several Specification
径向直接安装AO 轴向嵌装ZT
Stem mounting; bottom connection Flush mounting; back connection
产品详细资料请点击:高纯净型压力表系列YTJA.pdf
高纯净型压力表YTJ
无氧焊接用纯净压力表YTJA) A 级
纯水超声波清洗用纯净压力表(YTJB) / BA 级
洁净室用纯净压力表(YTJE) / EP 级
洁净表/高纯净型压力表YTJ-50H YTJB-50