高可靠性和精度的流量控制器
快速的响应时间
金属密封.
压电控制阀.
316L不锈钢材质.
5 ccm-100 slm流量
技术规格:
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Model |
SEC-4400 |
SEC-4500 |
SEC-4550 |
SEC-4600 |
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StandardFlow Range(N2 Eq.) |
5 sccm ~ 8 slm |
10 ~ 30 slm |
31 ~ 50 slm |
51 ~ 100 slm |
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Wetted Materials |
M (metal) -Type: SUS-316L-R (viton) type |
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Valve Piezo Valve |
(Normal Close or Normal Open) |
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FlowControl Range |
2 ~ 100% F.S. |
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Accuracy |
&plu***n; 1% F.S. |
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Resp***e |
<1.0sec. (500ms typical) |
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Linearity |
&plu***n; 0.5% F.S. |
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Repeatability |
&plu***n; 0.2% F.S. |
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Operating Pressure |
14 ~ 42 psi |
21 ~ 42 psi |
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Leak Integrity |
M-Type: 5x10 -10 Pa·m ³/s(He) or less |
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Operating Temperature |
5 ~ 50 °C (Accuracy guaranteed 15 ~ 35 °C) |
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Flow Rate Setting Signal |
0.1 ~ 5VDC |
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Flow Rate Output Signal |
0 ~ 5VDC |
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Power Supply |
&plu***n; 15VDC &plu***n; 5% 60mA |
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Standard Fitting |
1/4” VCR, 1/4” Swagelok |
3/8”VCR,3/8”Swagelok |
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