Remarks:
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Vacuum Chamber, Aluminum, Rectangle, 6”*6”*4”
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Electrode Configuration, Silngle 5”*5” Horizontal
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RF Generator & Matching Network 125W, 50KHz
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1~2 Gas channels W/Precision Needle Valve Flow Control, 0~25 CC/min
Vacuum Gauge, 0~1Torr
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Vacuum Pump, 5 CFM, Oxyger Service
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Process Sequence, Single
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AC Input 120V, 50Hz, 15A