SPI OPC-60A锇膜镀膜仪
在SEM或者FE-SEM研究领域，有时对导电膜层要求非常高，这时常规的金、铂等金属已经不能满足要求。此时，锇膜就是比较好的选择。即使仅镀几个纳米厚度的膜，膜层也会获得非常好的导电性。OPC锇膜镀膜仪是一款划时代的镀膜仪器。
不同与常规的离子溅射和蒸镀的膜层加工，OPC锇膜镀膜仪采用了全新的SIYANGHUAE气体压缩方式获得锇膜，质量更好，效率更高。不论是离子溅射还是蒸镀，当高倍观察时，膜层粒子本身的粒度过大带来的问题是不可避免的。而OPC锇膜镀膜仪很好的解决了这个问题。
仪器参数：
|
型号 |
OPC-80T |
OPC-60A |
|
腔室 |
Hard glass chamber: 160mm(OD)x105mm(H) |
Hard glass chamber: 120mm(OD)x73mm(H) |
|
膜厚 |
a few - few dozen nm
|
a few - few dozen nm
|
|
样品台 |
Two holes for 10mm dia SEM holder, Two holes for 15mm dia SEM holder, and one hole for 32mm dia SEM holder |
Seven holes for 10mm dia SEM holder, Four holes for 15mm dia SEM holder, or One hole for 32mm dia SEM holder |
|
镀膜种类 |
O***ium(OsO4) |
O***ium |
|
锇储存 |
Detachable, sealing up, has view port, is able to be stored in a freezer
|
Detachable, sealing up, has view port, is able to be stored in a freezer
|
|
Detachable, has view port
|
||
|
气体输入 |
OsO4 ampoule is split in an OsO4 reservoir and its sublimated gas is introduced into gas reactor chamber. |
OsO4 ampoule is split in an OsO4 reservoir and its subkimated gas is introduced into gas reactor chamber. |
|
电源 |
AC100V 2A 200W(50/60Hz) |
AC100V 2A 200W(50/60Hz) |
|
尺寸 |
450(w)x410(D)x390(H)mm |
450(w)x350(D)x330(H)mm |
|
重量 |
Approx. 30kg |
Approx. 20kg |
订购信息
|
货号 |
产品描述 |
规格 |
|
OPC-60A |
锇膜镀膜仪O***ium Pla***a Coater |
台 |
|
OPC-80T |
锇膜镀膜仪O***ium Pla***a Coater |
台 |