超平硅片（AFM、SEM用硅片）
常作为AFM基底片用在科学研究中，超平硅片的一些参数如下：
|
|
4" |
6" |
8" |
|
直径 |
100 mm |
150 mm |
200 mm |
|
向性 |
<100> |
<100> |
<100> |
|
级别 |
P/Boron |
P/Boron |
P/Boron |
|
Growth Method: |
CZ |
CZ |
CZ |
|
电阻率 |
10-20 Ohm-cm |
10-20 Ohm-cm |
10-20 Ohm-cm |
|
厚度 |
525µm &plu***n;20µm |
675µm &plu***n;20µm |
725µm &plu***n;20µm |
|
TTV: |
<4.00µm |
<4.00µm |
<4.00µm |
|
SFPD: |
<2.0µm |
<2.0µm |
<2.0µm |
|
Warp: |
≤30µm |
≤30µm |
≤30µm |
|
Bow: |
≤30µm |
≤30µm |
≤30µm |
|
微粒数 |
≤20@≥0.3µm |
≤20@≥0.3µm |
≤20@≥0.3µm |
|
正面Front Surface |
Polished |
Polished |
Polished |
|
背面Back Surface |
Etched |
Etched |
Etched |
|
平整度Flat: |
2 per SEMI Standard |
1 per SEMI Standard |
2 per SEMI Standard |
|
Site Flatness: |
<2.0µm |
<2.0µm |
<2.0µm |
|
粗糙Roughness |
Typically 2-3Å |
Typically 2-3Å |
Typically 2-3Å |
产品选购：
|
货号 |
产品名称 |
规格 |
|
71893-01 |
Ultra-Flat Silicon Wafer, 4" |
1片 |
|
71893-02 |
Ultra-Flat Silicon Wafer, 6" |
1片 |
|
71893-03 |
Ultra-Flat Silicon Wafer, 8" |
1片 |