主要特点Main features
前端配有预热炉，可用于蒸发固态源
Equipped with a preheating furnace for evaporating solid state sources
加热炉选用滑轨炉，可实现快速升温/降温，缩短实验时间
Uses a slide furnace to achieve rapid heating/cooling and shorten the experiment time.
法兰端采用卡箍密封，这样就使进料出料更加的方便。
The flange end is sealed by a clamp, which makes the feeding and discharging more convenient.
进气系统可以按照客户的实验需求配置几路质量流量计，流量计的量程也可以选择不同的配置，真空系统也可以根据客户的需求选择配置各种真空泵。
窗体底端
Gas supply system can be configured with several mass flow meters according to the customer's experimental requirements. The flow meter's range can also be selected in different configurati***. The vacuum system can also be configured with various vacuum pumps according to customer requirements.
技术参数Technical Parameters
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Preheating Furnace预热炉 |
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Max. Temp |
400℃ |
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温区长度zone length |
100mm |
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Heating furnace滑轨炉 |
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Max. Temp |
1200℃ |
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Power 功率 |
2KW (220V) |
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温区长度zone length |
Heating：440mm C***tant：200mm |
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控温方式 |
lPID automatic control and auto-tune function. 模糊PID控制和自整定调节 l30 programmable segments for precise thermal processing. 智能化30段可编程控制 lBuilt-in protection for the over-heated and broken thermocouple. 超温和断偶报警功能 |
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Heating Elements 加热元件 |
·Resistance wire, Fe-Cr-Al Alloy doped by Mo 电阻丝（掺钼铁铬铝合金） |
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Temperature Accuracy 控温精度 |
+/- 1℃ |
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Processing tube 炉管 |
Size：Φ50*1650mm 尺寸：Φ50*1650mm
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Gas supply system气路系统 |
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连接头类型Connector style |
双卡套不锈钢接头Double cutting ferrule stainless steel connector |
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标准量程（N2)Standard range(N2) |
50sccm、100sccm、200sccm、500sccm； （可根据用户要求定制）optional |
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准确度Accuracy |
·&plu***n;1.5%FS |
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响应时间Resp***e time |
Gas characteristics：1～4sec 气特性 Electrical characteristics:10sec 电特性 |
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线性Linearity |
&plu***n;0.5～1.5% |
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Working pressure difference range 工作压差范围 |
0.1～0.5MPa |
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Max. pressure***大压力 |
·3MPa |
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压力真空表Pressure vacuum gauge |
－0.1～0.15 MPa, 0.01 MPa/格 |
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Vacuum unit真空系统 |
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空气相对湿度Relative air humidity |
≤85% |
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抽速pumping |
10m³/h |
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真空度vacuum |
10-1Pa |
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容油量Oil capacity |
1.1L |
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转速Rotation rate |
1450rpm |
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噪音Noise |
50dB |