HPC1100高压控制器压缩空气减压装置

HPC 1100 High Pressure Controller

Designed using the latest technology in high-pressure gas components, the HPC 1100 allows attachment of Lighthouse 0.1µm particle counters to high pressure (30-150 psi) inert gas systems to provide monitoring capability for process gas contamination.

The HPC 1100’s exceptionally low audible noise and ***all footprint allow installation in areas where diffusers were thought impractical. The HPC 1100 zero counts in less than 5 minutes and does not induce spurious or random 0.1µm counts due to oscillati*** as other designs can.

The HPC 1100’s Stainless Steel design is rugged, reliable and requires almost no routine maintenance and never requires calibration. During normal operation, no inert gas is wasted - 100% of the gas supplied is used for the sampling process.

Designed and built by Lighthouse, a name you can trust.

Features

Benefits

Applicati***

• Supports 0.1μm at 1 CFM
   
• May be Used with Any Inert Gas
   
• Easy Set Up
   
• Simple Installation
   
• Front-mounted Flow Gauge
   
• Intuitive User Control
   
• Quiet Operation
   
• Fast Purge and Cleanup
   
• VCR Fittings Internally and Externally
   
• Stainless Steel C***truction

• Zero Gas Waste During Normal Operation
   
• Output at Near Atmospheric Pressure
   
• Low Noise
   
• ***all Footprint
   
• Easy System Integration
   
• 2 Year Warranty
  International Sales and Service Support
   
• Low Cost of Ownership

• Process Qualification
   
• Semiconductor Process Monitoring
   
• Flat Panel Process Monitoring
   
• Process Trend Analysis

Specificati***

Particle Size Range:

0.1μm or greater

Flow Rate:

1.0 CFM

Output Pressure:

Near Atmospheric

Input Pressure:

30-150 psi

Compatible Gases:

Nitrogen, Argon, Helium, CDA

Operating Noise Level:

<60 db

Enclosure:

Stainless Steel

Wetted Materials:

316L Stainless Steel, Hastelloy, PCTFE

Dimensi***:

5.61” (w) x 7.57” (h) x 10.32” (d) [14.22 x 19.30 x 26.21 cm]

Weight:

6 lbs (2.7 kg)

Accessories

Included:

Sample Tubing; VCR seals; Nylon Nut and Ferrule Set

Optional:

Additional Sample Tubing; 1/4-inch Female Coupling Body Fitting; Welded Stainless Steel In-Line 1/4-inch Filter (0.5μm, 2μm, 7μm, 15μm)

1100高压控制器

设计采用了***新的技术，在高压气体成分，HPC 1100允许LIGHTHOUSE 0.1μm的粒子计数器对高压（30-150 psi）的惰性气体系统提供工艺气体污染的监测能力。

HPC 1100的不锈钢设计坚固耐用，可靠，几乎不需要日常维护和校准。在正常操作过程中，惰性气体可被回收-采样过程中使用100％的供气。

LIGHTHOUSE产品，值得您的选择。

特征

优点

应用

• 可用于任何惰性气体
• 轻松设置
• 安装简单
• 前置流计
• 直观的用户控制
• 安静的操作
• 快速清除和清理
• VCR接头内部和外部
• 不锈钢结构

• 在正常操作过程中的零气体废物
• 近常压输出
• 低噪声
• 小尺寸
• 便于系统集成
• 2年保修的
• 较低的拥有成本

• 工艺鉴定
• 半导体制程监控
• 平板过程监控
• 过程趋势分析

规格

粒径范围

0.1μm 或更大

流速

1.0 CFM

输出压力

接近大气压

输入压力

30-150 psi

兼容气体

氮，***气，氦气

运行噪音

<60 db

外壳

不锈钢

材质

316L 不锈钢

尺寸

5.61” (w) x 7.57” (h) x 10.32” (d) [14.22 x 19.30 x 26.21 cm]

重量

6 lbs (2.7 kg)

配件

随机配件

采样管; VCR密封件; 尼龙螺帽；套圈

可选件

备用采样管; 14英寸不锈钢过滤器 (0.5μm, 2μm, 7μm, 15μm)