光发射显微镜是器件分析过程中针对漏电失效模式，必不可少的分析工具。器件在设计、生产制造过程中有绝缘缺陷，或者期间经过外界静***穿，均会造成器件漏电失效。漏电失效模式的器件在通电得状态下，内部形成流动电流，漏电位置的电子会发生迁移，形成电能向光能的转化，即电能以光能的方式释放，从而形成200nm~1700nm红外线。光发射显微镜主要利用红外线侦测器，通过红外显微镜探测到这些释放出来的红外线，从而精准的***到器件的漏电点。我司推出的P-100光发射显微镜(EMMI),在同业中具有超高的性价比,并凭借良好的***服务,迅速占领市场.目前大中国地区的知名失效分析客户有: 上海宜硕、深圳宜智发、上海闳康、上海矾诠、广州五所、北京电科院、东南大学、乐山菲尼克斯、深圳明微。。。。。。
Junction Leakage Oxide Leakage
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|
System |
Items |
Specification |
|
camera |
Cooling CCD Camera |
|
|
Cooling Silicon CCD |
-65 ℃ ",Forced Air +4 stage Peltier Cooling |
|
|
Pixelsize |
24umx24um |
|
|
Resoluiion |
512 x512 |
|
|
High QE |
UV~NIR |
|
|
QE At 1000nm |
>=20% |
|
|
Dual Read Out Mode |
Fast Scan Mode 2.5MHZ /Pixel |
|
|
Slow Scan Mode (High Sensitivity) 0.156MHz/Pixel |
||
|
Dark Current |
<=0.17 electron/pixel/s |
|
|
Readout noise |
7 electron(r.m.s) |
|
|
Dynamic range |
32875:1 |
|
|
A/D Converter |
16 bit |
|
|
Readout/control Interface |
IEEE 1394 |
|
|
Exposure Time |
20ms~7200s |
|
|
Contrast enhancement |
Max 16 x |
|
|
Microscope |
High Presicion Motorized XYZStage |
|
|
Stage Resolution |
0.1um |
|
|
Accuracy |
&plu***n;1um |
|
|
X Stroke (Moving Range) |
>50mm |
|
|
Y Stroke(Moving Range |
>30 mm |
|
|
Z Stroke |
>100mm |
|
|
Motorized Lens Changer With Optics |
4 holes/RS232 Control Interface |
|
|
Light Box |
Dual Light Source(Visible ,NIR)Auto Switch |
|
|
NIR Light Tran***ission |
>70% |
|
|
NIR Lens |
2.5x,5x,20x,100x |
|
|
Eyepieces |
10x |
|
|
Control C***ole |
X/Y/Z/Lens Change/Light Adjust |
|
|
Auto Lens Alighment |
Accuracy<5um |
|
|
Pattern/Emission Optics Switch |
|
|
|
InGaAs camera |
冷却方式 |
cooling down to -70摄氏度 |
|
侦测波长范围 |
900～1700nm | |
|
解析度 |
320*256（软件能力640*512） |
|
|
QE Range |
QE@1300nm>70% |
|
|
Pixel Size |
30um*30um |
|
|
High Gain |
>300sec | |
|
|
||
|
Dark Box With |
Inteligent Temperature Control Light |
|
|
High Stable Anti-Vibration Table |